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Carbides stand out because of their high hardness and wear-resistance. Thusthese materials are often discussed for coatings of machine tools etc. Withinthis work Boron Carbide (B4C) and Carbide (C) thin films were deposited on Si(100) substrates by pulsed-laser deposition technique. In order to improve thewear-resistance of the deposited films, we introduced a new working techniqueincluding the application of a second excimer laser in a special working mode.Thereby one laser was used to ablate the carbide material from a target and todeposit the material on the substrate. The light of the second laser wasdirected directly onto the substrate in order to modify the ablated material.We report on details for film deposition and film properties determined byScanning Electron Microscope, Energy Dispersive X-Ray Spectroscopy, X-RayDiffraction, Rutherford Backscattering, Raman Spectroscopy and tribologicalexperiments.

Increase of the wear resistance of carbide layers deposited by Pulsed Laser Deposition in addition with an auxiliary laser