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This paper presents the design, fabrication, and experimentalcharacterization of a peristaltic micropump. The micropump is composed of twolayers fabricated from polydimethylsiloxane (PDMS) material. The first layerhas a rectangular channel and two valve seals. Three rectangular minilightweight piezo-composite actuators are integrated in the second layer, andused as actuation parts. Two layers are bonded, and covered by two polymethylmethacrylate (PMMA) plates, which help increase the stiffness of the micropump.A maximum flow rate of 900 mokroliter per min and a maximum backpressure of 1.8kPa are recorded when water is used as pump liquid. We measured the powerconsumption of the micropump. The micropump is found to be a promisingcandidate for bio-medical application due to its bio-compatibility,portability, bidirectionality, and simple effective design.

Development of a peristaltic micropump for bio-medical applications based on mini LIPCA