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We studied the resonant diffraction signal from stepped surfaces of SrTiO3 atthe Ti 2p -> 3d (L2,3) resonance in comparison with x-ray absorption (XAS) andspecular reflectivity data. The steps on the surface form an artificialsuperstructure suited as a model system for resonant soft x-ray diffraction. Asmall step density on the surface is sufficient to produce a well defineddiffraction peak, showing the high sensitivity of the method. At largerincidence angles, the resonant diffraction spectrum from the steps on thesurface resembles the spectrum for specular reflectivity. Both deviate from theXAS data in the relative peak intensities and positions of the peak maxima. Wedetermined the optical parameters of the sample across the resonance and foundthat the differences between the XAS and scattering spectra reflect thedifferent quantities probed in the different signals. When recorded at lowincidence or detection angles, XAS and specular reflectivity spectra aredistorted by the changes of the angle of total reflection with energy. Also thestep peak spectra, though less affected, show an energy shift of the peakmaxima in grazing incidence geometry.

Resonant soft x-ray scattering from stepped surfaces of SrTiO3