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In this paper we present an electronic circuit for position or capacitanceestimation of MEMS electrostatic actuators based on a switched capacitortechnique. The circuit uses a capacitive divider configuration composed by afixed capacitor and the variable capacitance of the electrostatic actuator forgenerating a signal that is a function of the input voltage and capacitiveratio. The proposed circuit can be used to actuate and to sense position of anelectrostatic MEMS actuator without extra sensing elements. This approach iscompatible with the requirements of most analog feedback systems and thecircuit topology of pulsed digital oscillators (PDO).

A novel method for fatigue testing of MEMS devices containing movable elements