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Parametric amplification is an interesting way of artificially increasing aMEMS Quality factor and could be helpful in many kinds of applications. Thispaper presents a theoretical study of this principle, based on Matlab/Simulinksimulations, and proposes design guidelines for parametric structures. A newdevice designed with this approach is presented together with the correspondingFEM simulation results.

Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device