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Ac electrokinetic flows are commonly used for manipulating micron-scaleparticles in a biosensor system. At the solid-liquid state there are two kindsof processes in the reaction between analytes and ligands: the mass transportprocess and the chemical reaction process. The mass transport process isrelated to convection and diffusion. Total or partial limit of mass transportwould retard the diffusion from the bulk fluid to the interface of reaction.This effect decreases the possibility of adsorption of analyte and ligandbecause the chemical reaction is faster than the diffusion. In order to solvethis problem, we apply an ac electric field to induce a vortex field by theelectrothermal effect, which helps in increasing the rate of diffusion. Byusing the finite element analysis software, COMSOL Multiphysics, we optimizedseveral parameters of the microelectrode structures and the position of thereacting surface, i.e. the microcantilever, by a simplified 2-D model and a 3-Dmodel. It is successful in accelerating the reacting rate of the molecule whichis limited by mass transport. The factor of the efficiency is about 1.429 whenthe operating voltage is 15 Vrms peak-to-peak. In addition, the surfaceconcentration of the complex on the microcantilever has been simulated.

2-D Analysis of Enhancement of Analytes Adsorption Due to Flow Stirring by Electrothermal Force in The Microcantilever Sensor