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A new type of integrated temperature and humidity sensor applyingLTCC-technology has been developed and characterized. In this approach, sensingelements are implemented using heated metal resistors (Pt-elements), where oneis exposed to the humid environment that causes the sensor element to cool downwith increased humidity, while the other one is sealed from the environment.Sensor design is based on FEA (Finite Element Analyses) where the criticaldesign parameters have been analyzed with regard to the performancecharacteristic of the device. The set-up of sensor element will be shown andthe functional capability will be demonstrated by experimental results.

Set-up and characterization of a humidity sensor realized in LTCC-technology