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In this paper, design, fabrication and characterization issues of a bulksilicon-based, vibration powered, electric energy generator are addressed. Theconverter is based on an In-Plane Overlap Plate (IPOP) configuration [1].Measurements have shown that with a theoretically lossless electronics and astarting voltage of 5 V, power density of 58 $\mu$W/cm3 is achievable at theresonance frequency of 290 Hz. It can be further improved by reducing theparasitic capacitance, which can be achieved by silicon etching, but aconsiderable mass is lost. In [2], it is shown that 19% of mass reductionimproves power density from 12.95 $\mu$W/cm3 to 59 $\mu$W/cm3. Hence anenhancement in fabrication process is proposed, which is termed as BacksideDRIE. It helps in increasing power density without loosing an importantquantity of mass. Simulations have shown that 2.5% of mass removal improvespower density up to 76.71 $\mu$W/cm3. Initial simulation results and problemsof associated electronics are also discussed.

A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism