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Today, hot embossing and injection molding belong to the established plasticmolding processes in microengineering. Based on experimental findings, avariety of microstructures have been replicated so far using the processes.However, with increasing requirements regarding the embossing surface and thesimultaneous decrease of the structure size down into the nanorange, increasingknow-how is needed to adapt hot embossing to industrial standards. To reachthis objective, a German-Canadian cooperation project has been launched tostudy hot embossing theoretically by a process simulation and experimentally.The present publication shall report about the first results of the simulation- the modeling and simulation of large area replication based on an eight inchmicrostructured mold.

Modeling of large area hot embossing