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We have studied the electrically induced off-plane surface displacement ontwo microelectronic devices using Scanning Joule Expansion Microscopy (SJEM).We present the experimental method and surface displacement results. We showthat they can be successfully compared with surface displacement imagesobtained using an optical interferometry method. We also present thermal imagesusing Scanning Thermal Microscopy (SThM) technique to underline that SJEM ismore adapted to higher frequency measurements, which should improve the spatialresolution.

Joule Expansion Imaging Techniques on Microlectronic Devices