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In this investigation, the numerical simulation of electrohydrodynamic (EHD)ion-drag micropumps with micropillar electrode geometries have been performed.The effect of micropillar height and electrode spacing on the performance ofthe micropumps was investigated. The performance of the EHD micropump improvedwith increased applied voltage and decreased electrode spacing. The optimummicropillar height for the micropump with electrode spacing of 40$\mu$m andchannel height of 100$\mu$m at 200V was 40$\mu$m, where a maximum mass flowrate of 0.18g/min was predicted. Compared to that of planar electrodes, the 3Dmicropillar electrode geometry enhanced the overall performance of the EHDmicropumps.

Development of EHD Ion-Drag Micropump for Microscale Electronics Cooling Systems