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Reduced-Order Modelling of the Bending of an Array of An array ofmicromirrors for beam steering optical switching has been designed in a thickpolysilicon technology. A novel semi-analytical method to calculate the staticcharacteristics of the micromirrors by taking into account the flexuraldeformation of the structure is presented. The results are compared with 3Dcoupled-field FEM simulation.

Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors