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This paper presents a new research study on the platform fabrication offluorescence bio-detection chip with an optical fiber transmission. Anisotropicwet etching on (100) silicon wafers to fabrication V-groove for optical fiberalignment and micro-mirror were included. Combing with anodic bonding techniqueto adhere glass, silicon structure and optical fiber for a fluorescenceexcitation platform was completed. In this study, the etching solution 40% KOHwas used to study the parameters effect. The results show that workingtemperature is the main parameter to significantly effect the etch rate. Theanisotropic etching resulted 54.7 degrees reflective mirrors and itsreflectivity for optical beam were also examined. The surface roughness of themicro-mirror is Ra 4.1 nm measured using AFM, it provides excellent opticalreflection. The incident light and beam profiles were also examined for furtherstudy. This study can show this micro-platform adaptable for fluorescencebio-detection.

Miniaturized Fluorescence Excitation Platform with Optical Fiber for Bio-Detection Chips