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This paper presents a micromachined bandpass filter with miniature size thathas relatively outstanding performance. A silicon-based eight-order microstripbandpass filter is fabricated and measured. A novel design method of theinterdigital filter that can create two transmission zeros is described. Thelocation of the transmission zeros can be shifted arbitrarily in the stopband.By adjusting the zero location properly, the filter provides much better skirtrejection and lower insertion loss than a conventional microstrip interdigitalfilter. To reduce the chip size, through-silicon-substrate-via-hole is used.Good experimental results are obtained.

A Ku-Band Novel Micromachined Bandpass Filter with Two Transmission Zeros