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Using Rayleigh surface acoustic waves (SAW), the Young's modulus, the densityand the thickness of polycrystalline Silicon-Germanium (SiGe) films depositedon silicon and SiO2 were measured, in excellent agreement with theory. Thedispersion curve of the propagating SAW is calculated with a Boundary ElementMethod (BEM)-Model based on Green's functions. The propagating SAW is generatedwith a nanosecond laser in a narrowband scheme projecting stripes from a maskon the surface of the sample. For this purpose a glass mask and a liquidcrystal display (LCD) mask are used. The slope of the SAW is then measuredusing a probe beam setup. From the wavelength of the mask and the frequency ofthe measured SAW, the dispersion curve is determined point by point. Fittingthe BEM-Model to the measured nonlinear dispersion curve provides severalphysical parameters simultaneously. In the present work this is demonstratedfor the Young's modulus, the density and the thickness of SiGe films. Theresults from the narrowband scheme measurement are in excellent agreement withseparated measurements of the thickness (profilometer), the density (balance)and the Young's modulus (nanoindenter).

Measurement Technique for Elastic and Mechanical Properties of  Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and  Projection Masks