English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

This work presents recent advances in the development and the integration ofan electrochemical (chemicalelectrical energy conversion) micro power generatorused as a high voltage energy source for RF-MEMS powering. Autonomous MEMSrequire similarly miniaturized power sources. Up to day, solid state thin filmbatteries are realized with mechanical masks. This method doesn't allowdimensions below a few mm^2 active area, and besides the whole process flow isdone under controlled atmosphere so as to ensure materials chemical stability(mainly lithiated materials). Within this context, Microelectronicsmicro-fabrication procedures (photolithography, Reactive Ion Etching...) areused to reach both miniaturisation (100x100 $\mu$m^2 targeted unit cell activearea) and Above IC technological compatibility. All process steps developedhere are realized in clean room environment.

Above Ic Micro-Power Generators for RF-Mems