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Microdisks and microstadium resonators were fabricated on erbium dopedamorphous hydrogenated silicon (a-Si:H<Er>) layers sandwiched in air and nativeSiO2 on Si substrates. Annealing condition is optimized to allow large emissionat 1550 nm for samples with erbium concentrations as high as 1.02x10^20atoms/cm3. Near field scanning optical microscopy shows evidences of thesimultaneous presence of bow-tie and diamond scars. These modes indicate thehigh quality of the resonators and the potentiality for achieving amorphoussilicon microcavity lasers.

Rare-earth Doped Amorphous Silicon Microdisk and Microstadium Resonators with Emission at 1550nm