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Thermoreflectance methods by picosecond pulse heating and by nanosecond pulseheating have been developed under the same geometrical configuration as thelaser flash method by the National Metrology Institute of JAPAN, AIST. Usingthese light pulse heating methods, thermal diffusivity of each layer ofmultilayered thin films and boundary thermal resistance between the layers canbe determined from the observed transient temperature curves based on theresponse function method. The measurement results of various thin films astransparent conductive films used for flat panel displays, hard coating filmsand multilayered films of the next generation phase-change optical disk will bepresented.

Measurements of Thermophysical Property of Thin Films by Light Pulse Heating Thermoreflectance Methods