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Gold nanospheres, single wall carbon nanotubes (SWNT), and diamonoids werephyically incorporated into the negative photoresist SU-8. the mixtures werespin cast onto silicon or aluminium coated silicon wafers. ASTM standard D638tensile specimens were lithographically patterned in the materials and thenreleased from the substrate using Microchem'Omnicoat or an anodic metaldissolution process. the residual stresses, elastic moduli, and viscosity ofthe SU-8. Resistivity measurements of SU-8/SWNT nanocomposites were alsoinvestigates. We found the effective modulus and viscosity of the SU-8 testspecimens decreases with the addition of diamantane and SWNTs. Additionally,the SU-8/SWNT nanocomposites showed changes in resistivity with increasedstrain, suggesting a gauge factor for the 1 wt% SU-8/SWNT nanocomposite ofapproximately 2-4.

Suspension of Nanoparticles in SU-8 and Characterization of Nanocomposite Properties