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Diamond-Like Carbon (DLC) films have been shown to demonstrate varioustribological behaviors: in ultra-high vacuum (UHV), with either frictioncoefficients as low as 0.01 or less and very mild wear, or very high frictioncoefficients (>0.4) and drastic wear. These behaviors depend notably on gaseousenvironment, hydrogen content of the film [1], and on its viscoplasticproperties [2,3]. A relation between superlow friction in UHV andviscoplasticity has indeed been established for a-C:H films and confirmed for afluorinated sample (a-C:F:H). In this study, nanoindentation and nanoscratchtests were conducted in ambient air, using a nanoindentation apparatus, inorder to evaluate tribological behaviors, as well as mechanical andviscoplastic properties of different amorphous carbon films.

Viscoplastic Properties and Tribological Behavior of Diamond-Like Carbon Films Using Nanoindentation and Nanoscratch Tests