Open AccessGlobal optimization in inverse problem of scatterometry
Author(s) -
Lekbir Afraites,
Jérôme Hazart,
Patrick Schiavone
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - kriging , global optimization , robustness (evolution) , inverse problem , mathematical optimization , parametric statistics , optimization problem , inverse , computer science , nonlinear system , surrogate model , mathematics , algorithm , machine learning , statistics , mathematical analysis , geometry , biochemistry , chemistry , physics , quantum mechanics , gene
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