Open AccessSTUDIES ON THE ANGULAR DISTRIBUTION OF ISOTOPIC PREFERENTIAL SPUTTERING
Author(s) -
Chen Sm,
Wang Zx,
JS Pan,
LP Zheng
Publication year - 1989
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.38.1785
Subject(s) - sputtering , isotope , angular momentum , asymmetry , physics , atomic physics , nuclear physics , materials science , particle physics , thin film , classical mechanics , quantum mechanics
The angular distribution of isotopic sputtering was studied theoretically and experimentally in this paper. A careful experiment was carried out, and a theoretical model was established. The result was that the light isotopes are preferential ejected "normally" and the heavy ones "obliquely". The reason was considered to oe the energy and momentum asymmetry between light and heavy isotopes in the collision cascades. A simple formula of the angular distribution of isotopic sputtering which fits the experimental result is given in this paper.