Open AccessAPC Technique and Fault Detection and Classification System in Semiconductor Manufacturing Process
Author(s) -
Daegeun Ha,
Jae Mean Koo,
Damdae Park,
Chonghun Han
Publication year - 2015
Publication title -
je-eo lobos siseutem haghoe nonmunji/jeeo robot siseutem hakoe nonmunji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.215
H-Index - 11
eISSN - 2233-4335
pISSN - 1976-5622
DOI - 10.5302/j.icros.2015.15.0095
Subject(s) - semiconductor device fabrication , process (computing) , fault detection and isolation , computer science , fault (geology) , manufacturing process , reliability engineering , manufacturing engineering , engineering , artificial intelligence , materials science , optoelectronics , operating system , geology , seismology , wafer , actuator , composite material