Open Access3.1.1 Aktuelle Entwicklungen von MEMS IR-Sensorkomponenten
Author(s) -
M. Schädel,
J. Baldauf,
L. Long,
J. Freitag,
N. Thronicke,
K. Neckermann,
S. Nieland,
A. Grün,
I. Käpplinger,
Thomas Ortlepp
Publication year - 2019
Publication title -
tagungsband
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensoren2019/3.1.1
Subject(s) - microelectromechanical systems , materials science , computer science , optoelectronics