Open AccessSTRUCTURE AND COMPOSITION OF TITANIUM NITRIDE FILMS SYNTHESIZED BY MAGNETRON SPUTTERING
Author(s) -
A.B. BOZHBANBAY,
B.ZH. SEITOV
Publication year - 2022
Publication title -
k̦.a. âsaui atyndaġy halyk̦aralyk̦ k̦azak̦-tùrìk universitetìnìn̦ habarlary. matematika, fizika, informatika seriâsy
Language(s) - English
Resource type - Journals
ISSN - 2524-0080
DOI - 10.47526/2022-2/2524-0080.02
Subject(s) - titanium nitride , materials science , nitride , crystallite , tin , titanium , sputter deposition , diffusion barrier , nitrogen , argon , cavity magnetron , sputtering , analytical chemistry (journal) , chemical engineering , thin film , metallurgy , composite material , layer (electronics) , nanotechnology , chemistry , organic chemistry , chromatography , engineering