Open AccessFully CMOS-compatible Process Integration of Thin film Inductor with a Sputtered Bottom NiFe Core
Publication year - 2003
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.2.138
Subject(s) - inductor , materials science , core (optical fiber) , polyimide , etching (microfabrication) , optoelectronics , magnetic core , electrical engineering , stack (abstract data type) , voltage , layer (electronics) , composite material , electromagnetic coil , engineering , computer science , programming language
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