Open AccessMaterial and Structure Optimization of Substrate Support for Improving CVD Equipment Up Time
Author(s) -
Ram Woo,
Won Kyung Kim
Publication year - 2019
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2019.29.11.670
Subject(s) - bushing , materials science , breakage , ball (mathematics) , substrate (aquarium) , chemical vapor deposition , composite material , mechanical engineering , optoelectronics , engineering , mathematical analysis , oceanography , mathematics , geology