Open AccessFORMATION OF WEAR-RESISTANT COATINGS OF WORKING SURFACES OF TECHNOLOGICAL EQUIPMENT BASED ON ZIRCONIUM OXIDE AND COBALT FILMS BY MAGNETRON SPUTTERING METHOD
Author(s) -
Malyukov S. P,
Alexander Kovalev,
А В Саенко,
V Klunnikova Yu.,
D V Timoshchenko,
S S Zinovyev
Publication year - 2020
Publication title -
international journal of civil engineering and technology
Language(s) - English
Resource type - Journals
eISSN - 0976-6316
pISSN - 0976-6308
DOI - 10.34218/ijciet.11.3.2020.013
Subject(s) - materials science , zirconium , cobalt , metallurgy , sputter deposition , cavity magnetron , sputtering , oxide , thin film , nanotechnology