Open AccessTitanium Nitride Microelectrodes Deposited by Ion Beam Assisted E-beam Evaporation
Author(s) -
Ryynnen Tomi,
Matti Toivanen,
Susanrkilahti,
Jukka Lekkala
Publication year - 2016
Publication title -
frontiers in neuroscience
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.499
H-Index - 102
eISSN - 1662-4548
pISSN - 1662-453X
DOI - 10.3389/conf.fnins.2016.93.00123
Subject(s) - microelectrode , materials science , ion beam , evaporation , titanium , titanium nitride , focused ion beam , nitride , ion beam assisted deposition , beam (structure) , nanotechnology , ion , optoelectronics , metallurgy , optics , electrode , chemistry , layer (electronics) , physics , organic chemistry , thermodynamics