Open AccessCMOS-MEMS 8-BIT MEMDAC NANOPOSITIONER WITH INTEGRATED POSITION SENSING AND DIGITAL CONTROL
Author(s) -
Niladri Sarkar,
Raafat R. Mansour
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.109
Subject(s) - microelectromechanical systems , cmos , position (finance) , bit (key) , position sensor , computer science , digital control , electronic engineering , materials science , optoelectronics , electrical engineering , engineering , computer security , finance , rotor (electric) , economics