Open AccessDUAL-BEAM ACTUATION OF PIEZOELECTRIC ALN RF MEMS SWITCHES MONOLITHICALLY INTEGRATED WITH ALN CONTOUR-MODE RESONATORS
Author(s) -
Nipun Sinha,
Rashed Mahameed,
Chengjie Zuo,
M. B. Pisani,
Carrión Pérez,
Gianluca Piazza
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.6
Subject(s) - resonator , materials science , microelectromechanical systems , piezoelectricity , optoelectronics , beam (structure) , dual mode , dual (grammatical number) , electronic engineering , optics , engineering , physics , composite material , art , literature