Open AccessA quantitative analysis of multi-scale response of CMP pad: quasi-static and dynamic characterization of dry and wet pad
Author(s) -
Sunil Doddabasanagouda
Publication year - 2020
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31274/rtd-20201023-76
Subject(s) - characterization (materials science) , scale (ratio) , materials science , nanotechnology , cartography , geography