Open AccessEffect of microfabrication processes on surface roughness parameters and micro/nanoscale friction behavior of silicon surfaces
Author(s) -
S. Chandrasekaran
Publication year - 2020
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31274/rtd-20201023-46
Subject(s) - microfabrication , materials science , nanoscopic scale , surface roughness , silicon , nanotechnology , surface finish , surface (topology) , mechanical engineering , composite material , optoelectronics , engineering , geometry , fabrication , medicine , alternative medicine , mathematics , pathology