Open AccessHydrogenated microcrystalline silicon germanium material and photovoltaic devices prepared using ECR PECVD
Author(s) -
Jianhua Zhu
Publication year - 2018
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31274/rtd-180817-152
Subject(s) - plasma enhanced chemical vapor deposition , germanium , materials science , microcrystalline , microcrystalline silicon , photovoltaic system , silicon , optoelectronics , engineering physics , amorphous silicon , crystalline silicon , electrical engineering , engineering , chemistry , crystallography