Open AccessФинишная обработка поверхности монокристаллов титанил-фосфата калия кластерными ионами аргона
Author(s) -
Н.Г. Коробейщиков,
И.В. Николаев,
М.А. Роенко
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.06.47496.17646
Subject(s) - root mean square , materials science , irradiation , surface finish , surface roughness , argon , crystal (programming language) , potassium titanyl phosphate , ion beam , smoothing , ion , optics , analytical chemistry (journal) , beam (structure) , mineralogy , chemistry , composite material , physics , laser , computer science , organic chemistry , chromatography , quantum mechanics , nuclear physics , computer vision , programming language
It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm^–1).