Open AccessНовый подход к анализу фазового состава углеродсодержащих материалов методом времяпролетной вторично-ионной масс-спектрометрии
Author(s) -
М.Н. Дроздов,
Ю Н Дроздов,
А.И. Охапкин,
С.А. Краев,
М.А. Лобаев
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.02.47225.17557
Subject(s) - graphite , materials science , diamond , carbon fibers , diamond like carbon , secondary ion mass spectrometry , analytical chemistry (journal) , annealing (glass) , mass spectrum , ion , nanotechnology , chemistry , composite material , thin film , organic chemistry , chromatography , composite number
New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C_8/C_5 and CsC_8/CsC_4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.