Open AccessПрофильный анализ пленок ферритов-гранатов методом оптической эмиссионной спектроскопии тлеющего разряда
Author(s) -
Andrei A. Fedorenko,
V. N. Berzhanskiǐ,
A. V. Karavainikov,
A. N. Shaposhnikov,
A. R. Prokopov
Publication year - 2021
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2021.02.50372.187-20
Subject(s) - crystallization , materials science , annealing (glass) , heterojunction , elemental analysis , chemical engineering , spectroscopy , analytical chemistry (journal) , mineralogy , optoelectronics , metallurgy , chemistry , inorganic chemistry , chromatography , engineering , physics , quantum mechanics
Annotation.The paper presents the results of experiments on the application of the method of optical emission spectroscopy of a glow discharge for the profile analysis of vacuum-deposited single and two-layer films of multicomponent garnet ferrites of various compositions before and after crystallization annealing. The presence of internal and external transition layers was revealed, and the modification of their elemental composition during crystallization, as well as the different sequence of synthesis of individual components in ferrite-garnet heterostructures, was investigated.