Open AccessЗависимость энергетического распределения распыленных атомов от закона межатомного взаимодействия
Author(s) -
А.И. Толмачев,
Л. Форлано
Publication year - 2020
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2020.06.49271.335-19
Subject(s) - ion , atomic physics , distribution (mathematics) , chemistry , thermodynamics , materials science , physics , mathematics , mathematical analysis , organic chemistry
We calculated the energy distribution of sputtered atoms at ion bombardment of solids.Theoretical analysis includes solution of the system of two transport equations by the method of discrete streams. We demonstrated that the low-energy part of distribution takes the universal form containing the only coefficient. The value of coefficient increases with the increase of ion mass and decreases with gradual transfer from Rutherford interaction to the hard-core interaction.