Open AccessМногострийные кольцевые полевые эмиттеры с защитными металл-фуллереновыми покрытиями
Author(s) -
Г.Г. Соминский,
Т.А. Тумарева,
Е.П. Тарадаев,
А.А. Рукавицына,
М.Е. Гиваргизов,
А.Н. Степанова
Publication year - 2019
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/jtf.2019.02.47086.124-18
Subject(s) - materials science , torr , silicon , optoelectronics , current (fluid) , bilayer , nanotechnology , engineering physics , electrical engineering , chemistry , engineering , physics , thermodynamics , biochemistry , membrane
A technology of creation of annular silicon field emitters with bilayer metal–fullerene coating has been developed and their performance has been studied. It has been shown that annular emitters with a surface area of about 0.3 cm^2 provide a current up to 100–110 mA and stably operate under conditions of technical vacuum (~10^–7 Torr).