Open AccessЭффект интерфейсного легирования системы наностержней оксида цинка
Author(s) -
А.А. Рябко,
Д.С. Мазинг,
А.А. Бобков,
А.И. Максимов,
В.С. Левицкий,
Э.Ф. Лазнева,
А.С. Комолов,
В.А. Мошников,
Е.И. Теруков
Publication year - 2022
Publication title -
fizika tverdogo tela
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2022.11.53320.408
Subject(s) - x ray photoelectron spectroscopy , zinc , materials science , atomic layer deposition , oxide , conductivity , crystallite , layer (electronics) , inorganic chemistry , equivalent oxide thickness , electrical resistivity and conductivity , aluminium , analytical chemistry (journal) , chemical engineering , chemistry , metallurgy , nanotechnology , gate oxide , physics , electrical engineering , transistor , voltage , quantum mechanics , chromatography , engineering