Open AccessМорфология поверхности, микроструктура и пьезоэлектрический отклик перовскитовых островков в тонких пленках цирконата-титаната свинца
Author(s) -
И.П. Пронин,
Е.Ю. Каптелов,
С.В. Сенкевич,
Д.А. Киселев,
В.В. Осипов,
В.П. Пронин
Publication year - 2019
Publication title -
fizika tverdogo tela
Language(s) - English
Resource type - Journals
eISSN - 1726-7498
pISSN - 0367-3294
DOI - 10.21883/ftt.2019.12.48556.13ks
Subject(s) - materials science , lead zirconate titanate , piezoelectricity , perovskite (structure) , thin film , microstructure , composite material , substrate (aquarium) , sputter deposition , silicon , sputtering , phase (matter) , ferroelectricity , optoelectronics , nanotechnology , crystallography , dielectric , chemistry , geology , oceanography , organic chemistry
The features of the microstructure and piezoelectric response of perovskite islands in the matrix of the pyrochloric phase in thin lead zirconate titanate films formed by the method of radio-frequency magnetron sputtering are investigated. The radial heterogeneity of the surface morphology of the islands and the piezoelectric response is revealed. The role of two-dimensional mechanical stresses acting on a thin film from the side of the silicon substrate is discussed.