Supercritical CO2 Extraction of Porogen Phase: An Alternative Route to Nanoporous Dielectrics
Author(s) -
Jorge Lubguban
Publication year - 2004
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/839790
Subject(s) - nanoporous , materials science , supercritical fluid , chemical engineering , extraction (chemistry) , phase (matter) , dielectric , small angle x ray scattering , supercritical fluid extraction , porosity , polymer , composite material , scattering , nanotechnology , chromatography , organic chemistry , optics , chemistry , physics , optoelectronics , engineering
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