Open AccessMODERN TECHNOLOGY OF MICROELECTROMECHANICAL SYSTEMS DESIGN
Author(s) -
A. S. Baranov
Publication year - 2017
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2017-3-7
Subject(s) - microelectromechanical systems , systems engineering , engineering , design technology , computer science , nanotechnology , materials science