Open AccessENGINEERING ALGORITHMS AND MODELS NANOMETROLOGY HETEROSTRUCTURES
Author(s) -
V. V. Smogunov,
N. К. Yurkov,
Н. С. Кузнецов
Publication year - 2018
Publication title -
nadežnostʹ i kačestvo složnyh sistem
Language(s) - English
Resource type - Journals
ISSN - 2307-4205
DOI - 10.21685/2307-4205-2018-1-2
Subject(s) - nanometrology , computer science , algorithm , engineering , materials science , nanotechnology , atomic force microscopy