Open AccessMEAN NUMBER OF ATOMS, CHARGE AND ENERGY OF CLUSTERS UNDER ION SPUTTERING OF A METAL
Author(s) -
S. A. Kochkin
Publication year - 2019
Publication title -
izvestiâ vysših učebnyh zavedenij. povolžskij region. fiziko-matematičeskie nauki
Language(s) - English
Resource type - Journals
ISSN - 2072-3040
DOI - 10.21685/2072-3040-2019-2-8
Subject(s) - sputtering , atomic physics , charge (physics) , metal , ion , materials science , energy (signal processing) , physics , nanotechnology , thin film , metallurgy , quantum mechanics