Open AccessPeculiarities of Usage Diamond-Like Carbon Films as Antireflection Coating
Author(s) -
Dmytro Zelinskyi,
Viacheslav Horokhov,
О. С. Кондратенко,
Liudmyla Shmyrova,
T.V. Semikina
Publication year - 2020
Publication title -
elektronna ta akustična ìnženerìâ
Language(s) - English
Resource type - Journals
eISSN - 2617-0965
pISSN - 2524-2725
DOI - 10.20535/2617-0965.2020.3.3.199800
Subject(s) - refractive index , chemical vapor deposition , materials science , carbon film , ellipsometry , diamond , diamond like carbon , optics , deposition (geology) , silicon , carbon fibers , amorphous silicon , plasma enhanced chemical vapor deposition , coating , amorphous carbon , amorphous solid , thin film , analytical chemistry (journal) , optoelectronics , composite material , nanotechnology , crystalline silicon , composite number , chemistry , crystallography , paleontology , physics , sediment , biology , chromatography