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Microwave plasma generation using evanescent waves
Author(s) -
Volodymyr Volodymyrovych Perevertailo,
A. I. Kuzmichev
Publication year - 2017
Publication title -
mìkrosistemi, elektronìka ta akustika
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2523-4455
pISSN - 2523-4447
DOI - 10.20535/2523-4455.2017.22.6.105023
Subject(s) - surface wave , optics , total internal reflection , microwave , evanescent wave , waveguide , nanophotonics , plasma , surface plasmon , physics , materials science , plasmon , quantum mechanics

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