Open AccessThe magnetron discharge pulse excitation
Author(s) -
Oleh Mykolaiovych Bevza
Publication year - 2017
Publication title -
èlektronika i svâzʹ
Language(s) - English
Resource type - Journals
eISSN - 2312-1807
pISSN - 1811-4512
DOI - 10.20535/2312-1807.2017.22.3.105448
Subject(s) - atomic physics , cathode , cavity magnetron , ionization , argon , electron , high power impulse magnetron sputtering , anode , sputter deposition , materials science , chemistry , sputtering , physics , thin film , ion , electrode , nanotechnology , organic chemistry , quantum mechanics