Open AccessObtain and study of the Al O condensate with the rough surface during reactive ion deposition
Author(s) -
Sergii Borysovych Sydorenko
Publication year - 2017
Publication title -
èlektronika i svâzʹ
Language(s) - English
Resource type - Journals
eISSN - 2312-1807
pISSN - 1811-4512
DOI - 10.20535/2312-1807.2017.22.3.104582
Subject(s) - crucible (geodemography) , materials science , vacuum chamber , evaporation , aluminium , thermionic emission , deposition (geology) , coating , oxygen , metallurgy , chemical engineering , analytical chemistry (journal) , composite material , chemistry , paleontology , computational chemistry , physics , organic chemistry , chromatography , quantum mechanics , sediment , biology , engineering , thermodynamics , electron