Open AccessCluster model of the formation of aluminum nitride in alumina nanoreactors
Author(s) -
V.Y. Hlotov,
P.V. Deminskij,
N.O. Lyahova,
I. V. Masol,
V.I. Osinskij
Publication year - 2011
Publication title -
èlektronika i svâzʹ
Language(s) - English
Resource type - Journals
eISSN - 2312-1807
pISSN - 1811-4512
DOI - 10.20535/2312-1807.2011.16.4.244508
Subject(s) - nitride , nanoreactor , materials science , aluminium , aluminum oxide , cluster (spacecraft) , ion , oxide , nitrogen , chemical engineering , phase (matter) , nanopore , nanotechnology , inorganic chemistry , composite material , metallurgy , chemistry , nanoparticle , organic chemistry , layer (electronics) , computer science , engineering , programming language
The non-traditional method of obtainingclusters of heterogenous and homogenous nanooxides, nitrides of aluminum by substitution ofoxygen atoms with low-energy nitrogen ions inthe solid phase inside the nanopores of aluminum oxide Al2O3 (nanosapfire) is proposed and implemented. The AlN, AlNxO1-x, Al2O3 nanolayers was experimentally obtained